Tuning-fork crystal units

Sub-miniature tuning-fork crystal units & sub-miniature real-time clock modules

3-D photolithographic processing of crystal chips

Miniaturizing crystal chips with a conventional structure (left image) reduces the area of the electrodes (indicated in red).
Fabricating the chips with an H-groove structure provides a larger electrode area and raises electrolytic efficiency. This design enables miniaturized crystal with CI values as low as those on ordinary-sized crystals (right image).

The CI value of a crystal fabricated using QMEMS technology, however, remains constant, at a level equivalent to that of conventional crystals, even as crystal size decreases.